In this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of composition and excitation wavelength. The accuracy of the method and its limitations are evidenced through the analysis of a multilayer and of self-assembled islands.

Picco, A., Bonera, E., Pezzoli, F., Grilli, E., Schmidt, O., Isa, F., et al. (2012). Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy. NANOSCALE RESEARCH LETTERS, 7 [10.1186/1556-276X-7-633].

Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy

PICCO, ANDREA;BONERA, EMILIANO;PEZZOLI, FABIO;GRILLI, EMANUELE ENRICO;Cecchi, S;GUZZI, MARIO
2012

Abstract

In this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of composition and excitation wavelength. The accuracy of the method and its limitations are evidenced through the analysis of a multilayer and of self-assembled islands.
Articolo in rivista - Articolo scientifico
Raman; SiGe; Nanotechnology; Composition; Structural characterization; Raman efficiency
English
2012
7
633
none
Picco, A., Bonera, E., Pezzoli, F., Grilli, E., Schmidt, O., Isa, F., et al. (2012). Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy. NANOSCALE RESEARCH LETTERS, 7 [10.1186/1556-276X-7-633].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/41899
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